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BSI BS IEC 62047-28:2017

Semiconductor devices. Micro-electromechanical devices -- Performance testing method of vibration-driven MEMS electret energy harvesting devices
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BSI BS IEC 62047-28:2017

Semiconductor devices. Micro-electromechanical devices -- Performance testing method of vibration-driven MEMS electret energy harvesting devices

PUBLISH DATE 2020
PAGES 20
BSI BS IEC 62047-28:2017
IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 ?m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
SDO BSI: British Standards Institution
Document Number IEC 62047-28
Publication Date July 22, 2020
Language en - English
Page Count
Revision Level
Supercedes
Committee EPL/47
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