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BSI BS IEC 62047-30:2017

Semiconductor devices. Micro-electromechanical devices -- Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
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BSI BS IEC 62047-30:2017

Semiconductor devices. Micro-electromechanical devices -- Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

PUBLISH DATE 2017
PAGES 22
BSI BS IEC 62047-30:2017

This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

SDO BSI: British Standards Institution
Document Number IEC 62047-30
Publication Date Oct. 9, 2017
Language en - English
Page Count
Revision Level
Supercedes
Committee EPL/47
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