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BSI BS IEC 62047-32:2019

Semiconductor devices. Micro-electromechanical devices -- Test method for the nonlinear vibration of MEMS resonators
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BSI BS IEC 62047-32:2019

Semiconductor devices. Micro-electromechanical devices -- Test method for the nonlinear vibration of MEMS resonators

PUBLISH DATE 2019
PAGES 20
BSI BS IEC 62047-32:2019

This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

SDO BSI: British Standards Institution
Document Number IEC 62047-32
Publication Date Jan. 29, 2019
Language en - English
Page Count
Revision Level
Supercedes
Committee EPL/47
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