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BSI BS IEC 62047-42:2022

Semiconductor devices. Micro-electromechanical devices -- Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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BSI BS IEC 62047-42:2022

Semiconductor devices. Micro-electromechanical devices -- Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

PUBLISH DATE 2022
PAGES 24
BSI BS IEC 62047-42:2022

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SDO BSI: British Standards Institution
Document Number IEC 62047-42
Publication Date Oct. 24, 2022
Language en - English
Page Count
Revision Level
Supercedes
Committee EPL/47
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