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BSI BS IEC 62047-44:2024

Semiconductor devices. Micro-electromechanical devices -- Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
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BSI BS IEC 62047-44:2024

Semiconductor devices. Micro-electromechanical devices -- Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

PUBLISH DATE 2024
BSI BS IEC 62047-44:2024
Semiconductor devices. Micro-electromechanical devices.Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices.
SDO BSI: British Standards Institution
Document Number IEC 62047-44
Publication Date Feb. 29, 2024
Language en - English
Page Count
Revision Level
Supercedes
Committee EPL/47
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