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BSI BS ISO 13424:2013

Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis
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BSI BS ISO 13424:2013

Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis

PUBLISH DATE 2013
PAGES 58
BSI BS ISO 13424:2013

This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

SDO BSI: British Standards Institution
Document Number ISO 13424
Publication Date Oct. 31, 2013
Language en - English
Page Count
Revision Level
Supercedes
Committee CII/60
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