BSI BS EN ISO 14644-6:2007

Current Revision
Cleanrooms and associated controlled environments -- Vocabulary

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BSI BS EN ISO 14644-6:2007

Cleanrooms and associated controlled environments -- Vocabulary

PUBLISH DATE 2007
PAGES 48
BSI BS EN ISO 14644-6:2007

This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.

This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644.

It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.

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