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BSI BS EN ISO 14644-6:2007

Cleanrooms and associated controlled environments -- Vocabulary
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BSI BS EN ISO 14644-6:2007

Cleanrooms and associated controlled environments -- Vocabulary

PUBLISH DATE 2007
PAGES 48
BSI BS EN ISO 14644-6:2007

This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644. It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.

SDO BSI: British Standards Institution
Document Number ISO 14644-6
Publication Date Aug. 31, 2007
Language en - English
Page Count 48
Revision Level
Supercedes
Committee LBI/30
Publish Date Document Id Type View
Aug. 31, 2007 BS EN ISO 14644-6:2007 Revision