Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for Pirani gauges
This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges.
This document applies to Pirani vacuum gauges operating over a pressure range of 0,01Â Pa to 150Â kPa.
This document complements ISOÂ 3567 and ISOÂ 27893 when calibrating Pirani gauges and using them as reference standards.
In addition, this document defines procedures to characterize Pirani gauges for response time and hysteresis.
| SDO | BSI: British Standards Institution |
| Document Number | ISO 19685 |
| Publication Date | Sept. 27, 2017 |
| Language | en - English |
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| Supercedes | |
| Committee | MCE/8/-/4 |
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