BSI BS ISO 20146:2019

Current Revision
Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

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BSI BS ISO 20146:2019

Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

PUBLISH DATE 2019
PAGES 26
BSI BS ISO 20146:2019

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure, and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISOΒ 3567 and ISOΒ 27893 when calibrating CDGs and using them as reference standards.

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