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BSI BS ISO 20146:2019

Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
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BSI BS ISO 20146:2019

Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

PUBLISH DATE 2019
PAGES 26
BSI BS ISO 20146:2019

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

SDO BSI: British Standards Institution
Document Number ISO 20146
Publication Date March 12, 2019
Language en - English
Page Count
Revision Level
Supercedes
Committee MCE/8/-/4
Publish Date Document Id Type View
March 12, 2019 BS ISO 20146:2019 Revision