Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale
This International Standard specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.
| SDO | BSI: British Standards Institution |
| Document Number | ISO 24236 |
| Publication Date | May 12, 2005 |
| Language | en - English |
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| Supercedes | |
| Committee | CII/60 |
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