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BSI BS ISO 27894:2009

Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges
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BSI BS ISO 27894:2009

Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges

PUBLISH DATE 2010
PAGES 30
BSI BS ISO 27894:2009

This International Standard defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges. The reasons for this are as follows.

  1. This International Standard updates some terms and definitions given in ISO 3529-3:1981.

  2. This International Standard specifies information for suitable laboratories to correctly calibrate vacuum gauges under high and ultra-high vacua, since ionization gauges with hot cathodes are often used as reference standards. This information consists of the relevant parameters and characteristics suitable for quotation in manufacturers' instructions to users employing ionization gauges for traceable measurement of pressure under high or ultra-high vacua.

  3. This International Standard also lists those uncertainties associated with the measurement of pressure by the ionization gauge, which are known to be significant, and gives guidelines on how to evaluate them. It is possible that the list is not comprehensive for some current or future vacuum gauges.

  4. This International Standard complements ISO/TS 3567 and ISO/TS 27893 when using ionization gauges as reference standards.

SDO BSI: British Standards Institution
Document Number ISO 27894
Publication Date March 31, 2010
Language en - English
Page Count
Revision Level
Supercedes
Committee MCE/8/-/4
Publish Date Document Id Type View
March 31, 2010 BS ISO 27894:2009 Revision