BSI PD ISO/TR 19319:2013

Current Revision

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

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BSI PD ISO/TR 19319:2013

Name: BSI PD ISO/TR 19319:2013 – Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Brand: British Standards Institution
SKU: BSI PD ISO/TR 19319:2013
Price: 466.15 USD
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Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

PUBLISH DATE 2013

PAGES 126

This Technical Report describes:

Functions and their relevance to lateral resolution:
1. Point spread function (PSF) — see 4.1.1
2. Line spread function (LSF) — see 4.1.2
3. Edge spread function (ESF) — see 4.1.3
4. Modulation transfer function (MTF) — see 4.1.4
5. Contrast transfer function (CTF) — see 4.1.5.
Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
1. Imaging of a narrow stripe — see 4.2
2. Imaging of a sharp edge — see 4.3
3. Imaging of square-wave gratings — see 4.4.
Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.