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IEC 60204-33 Ed. 1.0 b:2009

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
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IEC 60204-33 Ed. 1.0 b:2009

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

PUBLISH DATE 2009
PAGES 252
IEC 60204-33 Ed. 1.0 b:2009
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
SDO IEC: International Electrotechnical Commission
Document Number IEC 60204
Publication Date Dec. 1, 2009
Language b - English & French
Page Count
Revision Level 1.0
Supercedes
Committee 44
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