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IEC 62047-1 Ed. 2.0 b:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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IEC 62047-1 Ed. 2.0 b:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

PUBLISH DATE 2016
PAGES 70
IEC 62047-1 Ed. 2.0 b:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date Jan. 1, 2016
Language b - English & French
Page Count
Revision Level 2.0
Supercedes
Committee 47F
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