Logo
Login Sign Up
Current Revision

IEC 62047-21 Ed. 1.0 b:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Best Price Guarantee
Instant

$131.00

2-5 Days

$131.00

SAVE 10%

$235.80


Sub Total (1 Item(s))

$ 0.00

Estimated Shipping

$ 0.00

Total (Pre-Tax)

$ 0.00


or
International Electrotechnical Commission Logo

IEC 62047-21 Ed. 1.0 b:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

PUBLISH DATE 2014
PAGES 30
IEC 62047-21 Ed. 1.0 b:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date June 19, 2014
Language b - English & French
Page Count 30
Revision Level 1.0
Supercedes
Committee 47F
Publish Date Document Id Type View
June 19, 2014 IEC 62047-21 Ed. 1.0 b:2014 Revision
June 19, 2014 Revision