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IEC 62047-21 Ed. 1.0 b:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
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IEC 62047-21 Ed. 1.0 b:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

PUBLISH DATE 2014
PAGES 30
IEC 62047-21 Ed. 1.0 b:2014

Semiconductor devices - Micro-electromechanical devices - Part 21:

Test method for Poisson's ratio of thin film MEMS materials

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials.

The materials have lengths and widths less than 10 mm and thicknesses less than 10 µm.

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date June 19, 2014
Language b - English & French
Page Count
Revision Level 1.0
Supercedes
Committee 47F
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