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IEC 62047-30 Ed. 1.0 en:2017

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
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IEC 62047-30 Ed. 1.0 en:2017

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

PUBLISH DATE 2017
PAGES 24
IEC 62047-30 Ed. 1.0 en:2017

Semiconductor devices - Micro-electromechanical devices - Part 30:

Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices.

This document applies to piezoelectric thin films fabricated by MEMS process.

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date Sept. 1, 2017
Language en - English
Page Count
Revision Level 1.0
Supercedes
Committee 47F
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