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IEC 62047-32 Ed. 1.0 b:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
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IEC 62047-32 Ed. 1.0 b:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

PUBLISH DATE 2019
PAGES 42
IEC 62047-32 Ed. 1.0 b:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators.

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators.

The statements made in this document apply to the development and manufacture of MEMS resonators.

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date Jan. 1, 2019
Language b - English & French
Page Count
Revision Level 1.0
Supercedes
Committee 47F
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