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IEC 62047-38 Ed. 1.0 en:2021

Semiconductor devices - Micro-electromechanical devices - Part 38: Test method for adhesion strength of metal powder paste in MEMS interconnection
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IEC 62047-38 Ed. 1.0 en:2021

Semiconductor devices - Micro-electromechanical devices - Part 38: Test method for adhesion strength of metal powder paste in MEMS interconnection

PUBLISH DATE 2021
PAGES 16
IEC 62047-38 Ed. 1.0 en:2021

Semiconductor devices - Micro-electromechanical devices - Part 38:

Test method for adhesion strength of metal powder paste in MEMS interconnection

IEC 62047-38:2021(E) specifies a test method for measuring the adhesion strength of metal powder paste in the electrical interconnection between micro-electromechanical systems (MEMS) and a circuit board. The typical examples of metal powder paste are anisotropic conductive paste, solder paste, and nanoscale metallic inks. This testing method is valid for metal powder diameters from 10 µm to 500 µm.

In this test method, a uniaxial compression load is applied to metal powder paste using a glass lens simulating an actual MEMS device; then, the adhesion strength is measured by retracting the lens. This test method is proper when the adhesion strength should be analyzed by considering the actual contact area between the MEMS device and metal powder particles.

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date June 1, 2021
Language en - English
Page Count
Revision Level 1.0
Supercedes
Committee 47F
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