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IEC 62047-6 Ed. 1.0 b:2009

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
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IEC 62047-6 Ed. 1.0 b:2009

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

PUBLISH DATE 2009
PAGES 34
IEC 62047-6 Ed. 1.0 b:2009

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

IEC 62047-6:2009 specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 ¦m and 10 ¦m under constant force range or constant displacement range.

Thin films are used as main structural materials for MEMS and micromachines.

The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, and test piece fabrication by means of non-mechanical machining, including photolithography.

This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features.

The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.

SDO IEC: International Electrotechnical Commission
Document Number IEC 62047
Publication Date April 1, 2009
Language b - English & French
Page Count
Revision Level 1.0
Supercedes
Committee 47F
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