IEC/TR 63258 Ed. 1.0 en:2021

Current Revision
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Best Price Guarantee Mar 1, 2021 English 1 Pages

Sub Total (1 Item(s)) $ 0.00
Estimated Shipping $ 0.00
Total (Pre-Tax) $ 0.00
View in Library
or
International Electrotechnical Commission Logo

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

PUBLISH DATE 2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films.

This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Loading...

Failed to load document history.

Publish Date Document Id Type View