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IEC/TS 62607-6-5 Ed. 1.0 en:2022

Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement
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International Electrotechnical Commission Logo

IEC/TS 62607-6-5 Ed. 1.0 en:2022

Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement

PUBLISH DATE 2022
IEC/TS 62607-6-5 Ed. 1.0 en:2022
Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement
IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics
  • contact resistance, and
  • sheet resistance
for graphene-based materials and other two-dimensional materials by a
  • transmission line measurement.
The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.
  • The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
  • The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.
SDO IEC: International Electrotechnical Commission
Document Number IEC/TS 62607
Publication Date Dec. 1, 2022
Language en - English
Page Count
Revision Level 1.0
Supercedes
Committee 113
Publish Date Document Id Type View
June 5, 2024 Revision
Dec. 1, 2022 IEC/TS 62607-6-5 Ed. 1.0 en:2022 Revision