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IEST RP-CC006.3

Testing Cleanrooms
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This RP provides standardized test procedures for determining cleanroom and clean zone performance. It is intended to assist with preparing detailed specifications for cleanroom procurement and for assuring operational compliance. Performance tests are recommended for cleanrooms in three operational phases. Data gathered through testing can be used to establish baselines, track trends, and justify repairs. The test methods may also be used for periodic monitoring of cleanroom performance.
SDO IEST: Institute of Environmental Sciences and Technology
Document Number RP-CC006
Publication Date Aug. 1, 2004
Language en - English
Page Count 28
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Aug. 1, 2004 IEST RP-CC006.3 Revision