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IEST RP-CC016.2

The Rate of Deposition of Nonvolatile Residue in Cleanrooms
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IEST RP-CC016.2 provides a uniform method and basis for determining the rate of deposition of nonvolatile residue (NVR) on surfaces in cleanrooms. In the design of the heating, ventilating, and air conditioning system, the selection of suitable filters, and the selection of materials used in the construction of the cleanroom, the requirements for the rate of deposition of NVR should be specified by the user. Designers of cleanrooms should consider the maximum deposition rates suggested by This RP when the deposition of NVR can affect the performance of products.
SDO IEST: Institute of Environmental Sciences and Technology
Document Number RP-CC016
Publication Date April 1, 2006
Language en - English
Page Count 20
Revision Level
Supercedes
Committee
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