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IEST RP-CC028.1

Minienvironments
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IEST RP-CC028.1 provides a framework for describing minienvironments for microelectronics and similar applications. It is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.
SDO IEST: Institute of Environmental Sciences and Technology
Document Number RP-CC028
Publication Date May 1, 2002
Language en - English
Page Count 28
Revision Level
Supercedes
Committee
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