ISO 15632:2021

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Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

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Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

PUBLISH DATE 2021

This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts.

This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization.

This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA).

The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.

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