ISO 18115-3:2022

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Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis

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ISO 18115-3:2022

Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis

PUBLISH DATE 2022
ISO 18115-3:2022

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques.

It also covers general optical terms.

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