ISO 22278:2020

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Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

PUBLISH DATE 2020
ISO 22278:2020

This document specifies the test method for measuring the **crystalline quality** of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam.

This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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