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Microbeam analysis - Scanning electron microscopy - Vocabulary
ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.
ISO 22493:2014 is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g., EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.
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