ISO 23131-3:2026

Current Revision
Ellipsometry - Part 3: Transparent single layer model

Best Price Guarantee English 36 Pages

Sub Total (1 Item(s)) $ 0.00
Estimated Shipping $ 0.00
Total (Pre-Tax) $ 0.00

You own the digital copy of this edition

View in Library
or
International Organization for Standardization Logo

ISO 23131-3:2026

Ellipsometry - Part 3: Transparent single layer model

ISO 23131-3:2026

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε₁) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Loading...

Failed to load document history.

Publish Date Document Id Type View