ISO 23131:2021

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Ellipsometry - Principles

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ISO 23131:2021

Ellipsometry - Principles

PUBLISH DATE 2021
ISO 23131:2021

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance, and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

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