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ISO 24639:2022

Microbeam analysis - Analytical electron microscopy - Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
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ISO 24639:2022

Microbeam analysis - Analytical electron microscopy - Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy

PUBLISH DATE 2022
ISO 24639:2022

This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.

This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.

SDO ISO: International Organization for Standardization
Document Number ISO 24639
Publication Date July 1, 2022
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 202/SC 3
Publish Date Document Id Type View
July 1, 2022 ISO 24639:2022 Revision