+1 888 608-7511
Need help finding a standard?
Help Desk
Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods
This document specifies the substrate conditions and testing of the modulation period.
The testing includes the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process.
This applies to nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
Failed to load document history.
| Publish Date | Document Id | Type | View |
|---|