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Geometrical product specifications (GPS) - Surface texture: Areal - Part 606: Design and characteristics of non-contact (focus variation) instruments
This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography.
Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well.
This document applies to focus variation without pattern illumination or with fixed pattern illumination.
This document does not cover methods using varying pattern illumination during the measurement.
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