ISO 25178-607:2019

Current Revision
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

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Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

PUBLISH DATE 2019

This document describes the *influence quantities* and *instrument characteristics* of confocal microscopy systems for *areal measurement* of surface topography.

Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

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