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Vacuum technology - Valves - Leak test
ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.
It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10-5 Pa m3/s for trace gas.
The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications.
A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as:
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