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Microbeam analysis - Analytical electron microscopy - Methods for calibrating image magnification by using reference materials with periodic structures
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM).
The reference materials used for calibration possess a periodic structure, such as:
This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera.
This document also refers to the calibration of a scale bar.
This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
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