ISO 3530:1979

Current Revision
Vacuum technology -- Mass-spectrometer-type leak-detector calibration

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ISO 3530:1979

Vacuum technology -- Mass-spectrometer-type leak-detector calibration

PUBLISH DATE 1979
ISO 3530:1979

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure.

Two procedures are outlined:

  • One to determine the minimum detectable leak rate
  • The other for determination of the minimum detectable concentration ratio.
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