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Metallic coatings - Measurement of coating thickness - Scanning electron microscope method
This document specifies a destructive method for the measurement of the local thickness of metallic and other inorganic coatings by examination of cross-sections with a scanning electron microscope (SEM). The method is applicable for thicknesses up to several millimetres, but for such thick coatings it is usually more practical to use a light microscope (see ISO 1463). The lower thickness limit depends on the achieved measurement uncertainty (see Clause 10).
NOTE: The method can also be used for organic layers when they are neither damaged by the preparation of the cross-section nor by the electron beam during imaging.
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