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ISO 14594:2024

Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
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This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.

This document is applicable for the analysis of a well-polished specimen using normal beam incidence.

This document does not apply to energy dispersive X-ray spectroscopy.

SDO ISO: International Organization for Standardization
Document Number ISO 14594
Publication Date Jan. 1, 2024
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 202/SC 2
Publish Date Document Id Type View
Jan. 1, 2024 ISO 14594:2024 Revision