ISO 18118:2024

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Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

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ISO 18118:2024

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy.

The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

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