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IEC/TS 62607-6-8 Ed. 1.0 en:2023

Nanomanufacturing - Key control characteristics - Part 6-8: Graphene - Sheet resistance: In-line four-point probe
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International Electrotechnical Commission Logo

IEC/TS 62607-6-8 Ed. 1.0 en:2023

Nanomanufacturing - Key control characteristics - Part 6-8: Graphene - Sheet resistance: In-line four-point probe

PUBLISH DATE 2023
IEC/TS 62607-6-8 Ed. 1.0 en:2023
Nanomanufacturing - Key control characteristics - Part 6-8: Graphene - Sheet resistance: In-line four-point probe
IEC TS 62607-6-8:2023 establishes a method to determine the key control characteristic sheet resistance RS [measured in ohm per square ( /sq)], by the in-line four-point probe method, 4PP.
The sheet resistance RS is derived by measurements of four-terminal electrical resistance performed on four electrodes placed on the surface of the planar sample.
The measurement range for RS of the graphene samples with the method described in this document goes from 10 2 /sq to 104 /sq.
The method is applicable for CVD graphene provided it is transferred to quartz substrates or other insulating materials (quartz, SiO2 on Si, as well as graphene grown from silicon carbide.
The method is complementary to the van der Pauw method (IEC 62607-6-7) for what concerns the measurement of the sheet resistance and can be useful when it is not possible to reliably place contacts on the sample boundary.
SDO IEC: International Electrotechnical Commission
Document Number IEC/TS 62607
Publication Date June 1, 2023
Language en - English
Page Count
Revision Level 1.0
Supercedes
Committee 113
Publish Date Document Id Type View
June 5, 2024 Revision
June 1, 2023 IEC/TS 62607-6-8 Ed. 1.0 en:2023 Revision